Inventor
KUROSAWA TOMOE
JP6 patents
Patents
6 patentsUS4716491ADec 29, 1987
High frequency plasma generation apparatus
HITACHI LTD110 citations95
US5133825AJul 28, 1992
Plasma generating apparatus
HITACHI LTD54 citations92
US4713585ADec 15, 1987
Ion source
HITACHI LTD42 citations92
US4851668AJul 25, 1989
Ion source application device
HITACHI LTD27 citations90
US4767931AAug 30, 1988
Ion beam apparatus
HITACHI LTD19 citations81
US4847476AJul 11, 1989
Ion source device
HITACHI LTD17 citations71