Inventor
HOOGERLAND MAARTEN
NZ3 patents
Patents
3 patentsUS6961116B2Nov 1, 2005
Lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV667 citations96
US7319506B2Jan 15, 2008
Alignment system and method
ASML NETHERLANDS BV24 citations90
US7564534B2Jul 21, 2009
Alignment system and method
ASML NETHERLANDS BV9 citations82