Inventor
HASTINGS JEFFREY T
US2 patents
Patents
2 patentsUS7417234B2Aug 26, 2008
Spatial-phase locking of energy beams for determining two-dimensional location and beam shape
MASSACHUSETTS INST TECHNOLOGY7 citations71
US7348104B2Mar 25, 2008
System and method for fabrication and replication of diffractive optical elements for maskless lithography
MASSACHUSETTS INST TECHNOLOGY1 citations50