Inventor
THANGARAJU SARASVATHI
SG8 patents
Patents
8 patentsUS8907496B1Dec 9, 2014
Circuit structures and methods of fabrication with enhanced contact via electrical connection
GLOBALFOUNDRIES INC4 citations72
US9761481B2Sep 12, 2017
Integrated circuits and methods of forming the same with metal layer connection to through-semiconductor via
GLOBALFOUNDRIES INC2 citations65
US9455188B2Sep 27, 2016
Through silicon via device having low stress, thin film gaps and methods for forming the same
GLOBALFOUNDRIES INC2 citations61
US9245790B2Jan 26, 2016
Integrated circuits and methods of forming the same with multiple embedded interconnect connection to same through-semiconductor via
GLOBALFOUNDRIES INC2 citations60
US10043764B2Aug 7, 2018
Through silicon via device having low stress, thin film gaps and methods for forming the same
GLOBALFOUNDRIES INC0 citations51
US9236301B2Jan 12, 2016
Customized alleviation of stresses generated by through-substrate via(S)
GLOBALFOUNDRIES INC1 citations51
US9658531B2May 23, 2017
Semiconductor device resolution enhancement by etching multiple sides of a mask
GLOBALFOUNDRIES INC0 citations48
US8895211B2Nov 25, 2014
Semiconductor device resolution enhancement by etching multiple sides of a mask
GLOBALFOUNDRIES INC0 citations48