Inventor

KAWAHARA KOUZOU

JP3 patents

Patents

3 patents

US11862489B2Jan 2, 2024

Substrate processing apparatus with electronic heater powered by power feeding coil

TOKYO ELECTRON LTD2 citations68

US11510284B2Nov 22, 2022

Substrate processing apparatus

TOKYO ELECTRON LTD1 citations60

US10201826B2Feb 12, 2019

Liquid coating method, liquid coating apparatus, and computer-readable storage medium

TOKYO ELECTRON LTD1 citations56