Inventor
KRATSCHMER ERNST
US3 patents
Patents
3 patentsUS12099304B2Sep 24, 2024
Electron beam lithography with dynamic fin overlay correction
IBM0 citations50
US11852975B2Dec 26, 2023
Electron beam lithography with dynamic fin overlay correction
IBM0 citations50
US6440639B1Aug 27, 2002
High-aspect ratio resist development using safe-solvent mixtures of alcohol and water
IBM0 citations50