Inventor
FARMER JASON A
US4 patents
Patents
4 patentsUS10651082B2May 12, 2020
Diffusion barriers
INTEL CORP0 citations48
US10096513B2Oct 9, 2018
Direct plasma densification process and semiconductor devices
INTEL CORP0 citations48
US9711399B2Jul 18, 2017
Direct plasma densification process and semiconductor devices
INTEL CORP1 citations48
US10777421B2Sep 15, 2020
Technologies for selectively etching oxide and nitride materials and products formed using the same
INTEL CORP0 citations34