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Inventor
FEENEY PAUL
US
4 patents
⚠️ This page may combine multiple inventors who share the name “FEENEY PAUL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
1 patent
US6348076B1
Feb 19, 2002
Slurry for mechanical polishing (CMP) of metals and use thereof
IBM
147 citations
98
BRUSIC VLASTA
1 patent
US9343330B2
May 17, 2016
Compositions for polishing aluminum/copper and titanium in damascene structures
BRUSIC VLASTA
41 citations
92
CABOT MICROELECTRONICS CORP
1 patent
US7897061B2
Mar 1, 2011
Compositions and methods for CMP of phase change alloys
CABOT MICROELECTRONICS CORP
14 citations
81
POMERANTZ JULIE
1 patent
US4516458A
May 14, 1985
Slicing device for foodstuffs
POMERANTZ JULIE
25 citations
76