Inventor
BLOKING JASON THOMAS
US3 patents
Patents
3 patentsUS7524750B2Apr 28, 2009
Integrated process modulation (IPM) a novel solution for gapfill with HDP-CVD
APPLIED MATERIALS INC55 citations96
US7867921B2Jan 11, 2011
Reduction of etch-rate drift in HDP processes
APPLIED MATERIALS INC7 citations83
US7745350B2Jun 29, 2010
Impurity control in HDP-CVD DEP/ETCH/DEP processes
APPLIED MATERIALS INC13 citations83