Inventor
HE JIM ZHONGYI
US8 patents
⚠️ This page may combine multiple inventors who share the name “HE JIM ZHONGYI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
7 patentsUS7064078B2Jun 20, 2006
Techniques for the use of amorphous carbon (APF) for various etch and litho integration scheme
APPLIED MATERIALS INC114 citations96
US7718081B2May 18, 2010
Techniques for the use of amorphous carbon (APF) for various etch and litho integration schemes
APPLIED MATERIALS INC17 citations92
US11114326B2Sep 7, 2021
Substrate chucking and dechucking methods
APPLIED MATERIALS INC6 citations71
US11114327B2Sep 7, 2021
ESC substrate support with chucking force control
APPLIED MATERIALS INC2 citations71
US10654147B2May 19, 2020
Polishing of electrostatic substrate support geometries
APPLIED MATERIALS INC5 citations71
US9805914B2Oct 31, 2017
Methods for removing contamination from surfaces in substrate processing systems
APPLIED MATERIALS INC0 citations51
US9472416B2Oct 18, 2016
Methods of surface interface engineering
APPLIED MATERIALS INC0 citations39