Inventor
KUO TENG-FANG
US12 patents
⚠️ This page may combine multiple inventors who share the name “KUO TENG-FANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
11 patentsUS9240315B1Jan 19, 2016
CVD oxide surface pre-conditioning by inductively coupled O2 plasma
APPLIED MATERIALS INC122 citations96
US10020218B2Jul 10, 2018
Substrate support assembly with deposited surface features
APPLIED MATERIALS INC18 citations93
US10861693B2Dec 8, 2020
Cleaning method
APPLIED MATERIALS INC14 citations84
US10679885B2Jun 9, 2020
Substrate support assembly with deposited surface features
APPLIED MATERIALS INC7 citations83
US9870921B2Jan 16, 2018
Cleaning method
APPLIED MATERIALS INC6 citations83
US11769683B2Sep 26, 2023
Chamber component with protective ceramic coating containing yttrium, aluminum and oxygen
APPLIED MATERIALS INC1 citations72
US11087979B2Aug 10, 2021
Cleaning method
APPLIED MATERIALS INC1 citations72
US10199221B2Feb 5, 2019
Cleaning method
APPLIED MATERIALS INC2 citations72
US11476146B2Oct 18, 2022
Substrate support assembly with deposited surface features
APPLIED MATERIALS INC0 citations61
US9805914B2Oct 31, 2017
Methods for removing contamination from surfaces in substrate processing systems
APPLIED MATERIALS INC0 citations51
US10008388B2Jun 26, 2018
Device conformity control by low temperature, low pressure, inductively coupled ammonia-nitrogen trifluoride plasma
APPLIED MATERIALS INC0 citations50