Inventor
DING ZHENWEN
US8 patents
⚠️ This page may combine multiple inventors who share the name “DING ZHENWEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
7 patentsUS10020218B2Jul 10, 2018
Substrate support assembly with deposited surface features
APPLIED MATERIALS INC18 citations93
US10861693B2Dec 8, 2020
Cleaning method
APPLIED MATERIALS INC14 citations84
US10679885B2Jun 9, 2020
Substrate support assembly with deposited surface features
APPLIED MATERIALS INC7 citations83
US11769683B2Sep 26, 2023
Chamber component with protective ceramic coating containing yttrium, aluminum and oxygen
APPLIED MATERIALS INC1 citations72
US11114327B2Sep 7, 2021
ESC substrate support with chucking force control
APPLIED MATERIALS INC2 citations71
US11476146B2Oct 18, 2022
Substrate support assembly with deposited surface features
APPLIED MATERIALS INC0 citations61
US9805914B2Oct 31, 2017
Methods for removing contamination from surfaces in substrate processing systems
APPLIED MATERIALS INC0 citations51