Inventor

LO CHI-CHING

TW2 patents

⚠️ This page may combine multiple inventors who share the name “LO CHI-CHING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TAIWAN SEMICONDUCTOR MFG

1 patent

US7102871B2Sep 5, 2006

Electrostatic chuck assembly having disassembling device

TAIWAN SEMICONDUCTOR MFG1 citations37

TAIWAN SEMICONDUCTOR MFG CO LTD

1 patent

US9607809B2Mar 28, 2017

High density plasma reactor with multiple top coils

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations32