Inventor
KARABEKOV ALBERT
IL6 patents
Patents
6 patentsUS7112803B2Sep 26, 2006
Beam directing system and method for use in a charged particle beam column
APPLIED MATERIALS ISRAEL LTD8 citations71
US7525091B2Apr 28, 2009
Charged particle beam system and a method for inspecting a sample
APPLIED MATERIALS ISRAEL LTD2 citations59
US11264202B2Mar 1, 2022
Generating three dimensional information regarding structural elements of a specimen
APPLIED MATERIALS ISRAEL LTD1 citations58
US10156785B2Dec 18, 2018
Inspection of a lithographic mask that is protected by a pellicle
APPLIED MATERIALS ISRAEL LTD0 citations50
US9366954B2Jun 14, 2016
Inspection of a lithographic mask that is protected by a pellicle
APPLIED MATERIALS ISRAEL LTD0 citations50
US10716197B2Jul 14, 2020
System, computer program product, and method for dissipation of an electrical charge
APPLIED MATERIALS ISRAEL LTD0 citations36