Inventor
CHEN I-LI
TW7 patents
Patents
7 patentsUS10475702B2Nov 12, 2019
Conductive feature formation and structure using bottom-up filling deposition
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US11410880B2Aug 9, 2022
Phase control in contact formation
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations71
US12482705B2Nov 25, 2025
Conductive feature formation and structure using bottom-up filling deposition
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12288716B2Apr 29, 2025
Phase control in contact formation
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12002712B2Jun 4, 2024
Phase control in contact formation
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US10714329B2Jul 14, 2020
Pre-clean for contacts
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations61
US10943823B2Mar 9, 2021
Conductive feature formation and structure using bottom-up filling deposition
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59