Inventor
KAMIYA YASUSHI
JP9 patents
⚠️ This page may combine multiple inventors who share the name “KAMIYA YASUSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON ANELVA CORP
8 patentsUS8378576B2Feb 19, 2013
Ion beam generator
CANON ANELVA CORP12 citations81
US9564360B2Feb 7, 2017
Substrate processing method and method of manufacturing semiconductor device
CANON ANELVA CORP7 citations80
US9190287B2Nov 17, 2015
Method of fabricating fin FET and method of fabricating device
CANON ANELVA CORP3 citations61
US10062545B2Aug 28, 2018
Apparatus and method for processing substrate using ion beam
CANON ANELVA CORP0 citations48
US9966092B2May 8, 2018
Ion beam etching method and ion beam etching apparatus
CANON ANELVA CORP1 citations48
US9422623B2Aug 23, 2016
Ion beam generator and ion beam plasma processing apparatus
CANON ANELVA CORP0 citations38
US9852879B2Dec 26, 2017
Ion beam processing method and ion beam processing apparatus
CANON ANELVA CORP0 citations36
US7704556B2Apr 27, 2010
Silicon nitride film forming method
CANON ANELVA CORP0 citations34