P

Inventor

AKASAKA HIROSHI

JP5 patents
⚠️ This page may combine multiple inventors who share the name “AKASAKA HIROSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CANON ANELVA CORP

3 patents
US9564360B2Feb 7, 2017

Substrate processing method and method of manufacturing semiconductor device

CANON ANELVA CORP7 citations80
US9966092B2May 8, 2018

Ion beam etching method and ion beam etching apparatus

CANON ANELVA CORP1 citations48
US9852879B2Dec 26, 2017

Ion beam processing method and ion beam processing apparatus

CANON ANELVA CORP0 citations36

MATSUI NAOKO

1 patent
US8465990B2Jun 18, 2013

Manufacturing method of magneto-resistance effect element

MATSUI NAOKO1 citations41

MATSUHASHI RYO

1 patent
US10685815B2Jun 16, 2020

Plasma processing apparatus and device manufacturing method

MATSUHASHI RYO0 citations31