Inventor
BAI KEUNHEE
KR13 patents
⚠️ This page may combine multiple inventors who share the name “BAI KEUNHEE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
11 patentsUS10754254B1Aug 25, 2020
Extreme ultraviolet (EUV) exposure apparatus and method of manufacturing semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD9 citations80
US9305802B2Apr 5, 2016
Methods of forming semiconductor devices using hard masks
SAMSUNG ELECTRONICS CO LTD5 citations71
US11031392B2Jun 8, 2021
Integrated circuit device having a work function control layer with a step portion located on an element isolation layer
SAMSUNG ELECTRONICS CO LTD2 citations68
US10600653B2Mar 24, 2020
Method for forming a fine pattern
SAMSUNG ELECTRONICS CO LTD1 citations59
US12113112B2Oct 8, 2024
Semiconductor device including gate structure and separation structure
SAMSUNG ELECTRONICS CO LTD0 citations58
US11769811B2Sep 26, 2023
Semiconductor device including gate structure and separation structure
SAMSUNG ELECTRONICS CO LTD0 citations58
US11201224B2Dec 14, 2021
Semiconductor device including gate structure and separation structure
SAMSUNG ELECTRONICS CO LTD0 citations58
US11086224B2Aug 10, 2021
Fabrication system of semiconductor device and method of fabricating a semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD1 citations58
US11016400B1May 25, 2021
Extreme ultraviolet exposure system
SAMSUNG ELECTRONICS CO LTD0 citations50
US9704745B2Jul 11, 2017
Methods of forming semiconductor device
SAMSUNG ELECTRONICS CO LTD1 citations49
US12100596B2Sep 24, 2024
Methods of manufacturing semiconductor devices
SAMSUNG ELECTRONICS CO LTD0 citations45