Inventor

CHEN BI-TROUG

TW2 patents

Patents

2 patents

US7193325B2Mar 20, 2007

Reliability improvement of SiOC etch with trimethylsilane gas passivation in Cu damascene interconnects

TAIWAN SEMICONDUCTOR MFG19 citations91

US6759342B2Jul 6, 2004

Method of avoiding dielectric arcing

TAIWAN SEMICONDUCTOR MFG4 citations56