Inventor

WAKIZAKO HITOSHI

JP3 patents

Patents

3 patents

US6927181B2Aug 9, 2005

Transfer robot and inspection method for thin substrate

YASKAWA DENKI SEISAKUSHO KK18 citations88

US7805219B2Sep 28, 2010

Carrier robot system and control method for carrier robot

YASKAWA DENKI SEISAKUSHO KK17 citations82

US7008884B2Mar 7, 2006

Transfer robot and inspection method for thin substrate

YASKAWA DENKI SEISAKUSHO KK8 citations69