Inventor

SAGASAKI YUKITO

JP2 patents

Patents

2 patents

US6927181B2Aug 9, 2005

Transfer robot and inspection method for thin substrate

YASKAWA DENKI SEISAKUSHO KK18 citations88

US7008884B2Mar 7, 2006

Transfer robot and inspection method for thin substrate

YASKAWA DENKI SEISAKUSHO KK8 citations69