Inventor

WARREN JEFFREY C

US3 patents

Patents

3 patents

US6764288B1Jul 20, 2004

Two stage scroll vacuum pump

VARIAN INC15 citations79

US6884047B1Apr 26, 2005

Compact scroll pump

VARIAN INC7 citations69

US7244113B2Jul 17, 2007

Scroll pump with controlled axial thermal expansion

VARIAN INC2 citations58