Inventor
ZALICKI PIOTR
US4 patents
Patents
4 patentsUS7317531B2Jan 8, 2008
Apparatus and methods for detecting overlay errors using scatterometry
KLA TENCOR TECH CORP83 citations98
US7301634B2Nov 27, 2007
Apparatus and methods for detecting overlay errors using scatterometry
KLA TENCOR TECH CORP35 citations96
US7933016B2Apr 26, 2011
Apparatus and methods for detecting overlay errors using scatterometry
KLA TENCOR TECH CORP15 citations92
US7663753B2Feb 16, 2010
Apparatus and methods for detecting overlay errors using scatterometry
KLA TENCOR TECH CORP19 citations92