Inventor
DECECCO PAOLA
US9 patents
⚠️ This page may combine multiple inventors who share the name “DECECCO PAOLA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR TECH CORP
4 patentsUS7317531B2Jan 8, 2008
Apparatus and methods for detecting overlay errors using scatterometry
KLA TENCOR TECH CORP83 citations98
US7933016B2Apr 26, 2011
Apparatus and methods for detecting overlay errors using scatterometry
KLA TENCOR TECH CORP15 citations92
US7663753B2Feb 16, 2010
Apparatus and methods for detecting overlay errors using scatterometry
KLA TENCOR TECH CORP19 citations92
US7379183B2May 27, 2008
Apparatus and methods for detecting overlay errors using scatterometry
KLA TENCOR TECH CORP18 citations92
DECECCO PAOLA
3 patentsUS8269167B2Sep 18, 2012
Method and system for non-destructive distribution profiling of an element in a film
DECECCO PAOLA9 citations81
US9201030B2Dec 1, 2015
Method and system for non-destructive distribution profiling of an element in a film
DECECCO PAOLA2 citations60
US8610059B2Dec 17, 2013
Method and system for non-destructive distribution profiling of an element in a film
DECECCO PAOLA2 citations60