Inventor
GUARINI THERESA K
US3 patents
Patents
3 patentsUS9683308B2Jun 20, 2017
Method and apparatus for precleaning a substrate surface prior to epitaxial growth
APPLIED MATERIALS INC8 citations82
US10837122B2Nov 17, 2020
Method and apparatus for precleaning a substrate surface prior to epitaxial growth
APPLIED MATERIALS INC0 citations50
US10428441B2Oct 1, 2019
Method and apparatus for precleaning a substrate surface prior to epitaxial growth
APPLIED MATERIALS INC0 citations50