Inventor
SHIMMURA SATOSHI
JP7 patents
⚠️ This page may combine multiple inventors who share the name “SHIMMURA SATOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
6 patentsUS11273464B2Mar 15, 2022
Substrate processing apparatus
TOKYO ELECTRON LTD10 citations82
US10379441B2Aug 13, 2019
Liquid processing apparatus
TOKYO ELECTRON LTD2 citations68
US12257611B2Mar 25, 2025
Cleaning jig, coating apparatus, and cleaning method
TOKYO ELECTRON LTD0 citations50
US11862485B2Jan 2, 2024
Nozzle standby device, liquid processing apparatus and operation method of liquid processing apparatus
TOKYO ELECTRON LTD0 citations50
US11235350B2Feb 1, 2022
Solution treatment apparatus and cleaning method for solution treatment apparatus
TOKYO ELECTRON LTD0 citations50
US11868057B2Jan 9, 2024
Solution treatment apparatus and cleaning method
TOKYO ELECTRON LTD0 citations49