Inventor
TSUJIKAWA TAKURO
JP5 patents
⚠️ This page may combine multiple inventors who share the name “TSUJIKAWA TAKURO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
4 patentsUS10120294B2Nov 6, 2018
Lithography apparatus and article manufacturing method
CANON KK4 citations67
US10095124B2Oct 9, 2018
Detection apparatus, lithography apparatus, method of manufacturing article, and detection method
CANON KK2 citations67
US10460433B2Oct 29, 2019
Measurement method, measurement apparatus, lithography apparatus, and method of manufacturing article
CANON KK1 citations57
US9575413B2Feb 21, 2017
Exposure apparatus, exposure method, and device manufacturing method
CANON KK0 citations36