Inventor
ENOMOTO TATSUO
JP10 patents
⚠️ This page may combine multiple inventors who share the name “ENOMOTO TATSUO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SHINETSU HANDOTAI KK
9 patentsUS9728442B2Aug 8, 2017
Workpiece holding apparatus
SHINETSU HANDOTAI KK9 citations81
US5211794AMay 18, 1993
Wafer etching apparatus
SHINETSU HANDOTAI KK20 citations77
US7902042B2Mar 8, 2011
Method of manufacturing SOI wafer and thus-manufactured SOI wafer
SHINETSU HANDOTAI KK2 citations62
US11584037B2Feb 21, 2023
Wire saw apparatus and method for manufacturing wafer
SHINETSU HANDOTAI KK0 citations59
US9931730B2Apr 3, 2018
Automatic handling apparatus with positioning pins
SHINETSU HANDOTAI KK1 citations49
US10730161B2Aug 4, 2020
Method for conditioning polishing pad and polishing apparatus
SHINETSU HANDOTAI KK0 citations38
US10434621B2Oct 8, 2019
Workpiece processing apparatus and workpiece processing method
SHINETSU HANDOTAI KK0 citations38
US10236191B2Mar 19, 2019
Wafer drying apparatus and method for drying a wafer
SHINETSU HANDOTAI KK0 citations38
US10166649B2Jan 1, 2019
Machining apparatus for workpiece
SHINETSU HANDOTAI KK0 citations38