Inventor
SEYAMA MASAHIRO
JP7 patents
⚠️ This page may combine multiple inventors who share the name “SEYAMA MASAHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ADVANTEST CORP
5 patentsUS6163159ADec 19, 2000
Charged particle beam test system
ADVANTEST CORP14 citations69
US9859099B2Jan 2, 2018
Exposure apparatus and exposure method
ADVANTEST CORP0 citations50
US9977337B2May 22, 2018
Exposure apparatus and exposure method
ADVANTEST CORP0 citations40
US7262410B2Aug 28, 2007
Sample observing apparatus and sample observing method
ADVANTEST CORP0 citations39
US9607807B2Mar 28, 2017
Charged particle beam exposure apparatus suitable for drawing on line patterns, and exposure method using the same
ADVANTEST CORP0 citations36