Inventor
HUSSEY NORMAN E
US5 patents
⚠️ This page may combine multiple inventors who share the name “HUSSEY NORMAN E”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
VARIAN SEMICONDUCTOR EQUIPMENT
4 patentsUS7663125B2Feb 16, 2010
Ion beam current uniformity monitor, ion implanter and related method
VARIAN SEMICONDUCTOR EQUIPMENT8 citations81
US8853653B1Oct 7, 2014
Apparatus and techniques for controlling ion implantation uniformity
VARIAN SEMICONDUCTOR EQUIPMENT6 citations80
US9006692B2Apr 14, 2015
Apparatus and techniques for controlling ion implantation uniformity
VARIAN SEMICONDUCTOR EQUIPMENT1 citations48
US7820987B2Oct 26, 2010
Predicting dose repeatability in an ion implantation
VARIAN SEMICONDUCTOR EQUIPMENT0 citations48