Inventor

HAGIO MITSUAKI

JP2 patents

Patents

2 patents

US7789614B2Sep 7, 2010

Aligner

YASKAWA DENKI SEISAKUSHO KK9 citations79

US7959400B2Jun 14, 2011

Aligner, wafer transferring device, and semiconductor production device

YASKAWA DENKI SEISAKUSHO KK4 citations58