Inventor

YAMAGA MASARU

JP2 patents

Patents

2 patents

US7969553B2Jun 28, 2011

Exposure device with mechanism for forming alignment marks and exposure process conducted by the same

ORC MFG CO LTD6 citations57

US7119882B2Oct 10, 2006

Apparatus and method for projection exposure

ORC MFG CO LTD0 citations37