Inventor

FUKUDA MASANAO

JP6 patents

⚠️ This page may combine multiple inventors who share the name “FUKUDA MASANAO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI INT ELECTRIC INC

1 patent

US9412582B2Aug 9, 2016

Reaction tube, substrate processing apparatus, and method of manufacturing semiconductor device

HITACHI INT ELECTRIC INC464 citations98

HARA DAISUKE

1 patent

US9028614B2May 12, 2015

Substrate processing apparatus

HARA DAISUKE19 citations80

FUKUDA MASANAO

1 patent

US9074284B2Jul 7, 2015

Heat treatment apparatus

FUKUDA MASANAO7 citations78

YUASA KAZUHIRO

1 patent

US8901013B2Dec 2, 2014

Substrate processing apparatus, method of processing substrate and method of manufacturing semiconductor device

YUASA KAZUHIRO2 citations61

HIROCHI YUKITOMO

1 patent

US9084298B2Jul 14, 2015

Substrate processing apparatus including shielding unit for suppressing leakage of magnetic field

HIROCHI YUKITOMO1 citations45

KOKUSAI ELECTRIC CORP

1 patent

US10290494B2May 14, 2019

Method of manufacturing semiconductor device and method of processing substrate

KOKUSAI ELECTRIC CORP0 citations41