Inventor

TAKESHITA MITSUNORI

JP5 patents

⚠️ This page may combine multiple inventors who share the name “TAKESHITA MITSUNORI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI INT ELECTRIC INC

2 patents

US9059229B2Jun 16, 2015

Substrate processing apparatus and method of manufacturing semiconductor device

HITACHI INT ELECTRIC INC2 citations61

US10755962B2Aug 25, 2020

Substrate processing apparatus and method of manufacturing semiconductor device

HITACHI INT ELECTRIC INC0 citations43

TAKESHITA MITSUNORI

1 patent

US9111972B2Aug 18, 2015

Substrate processing apparatus and manufacturing method for a semiconductor device

TAKESHITA MITSUNORI443 citations96

KOKUSAI ELECTRIC CORP

1 patent

USD937385SNov 30, 2021

Return nozzle

KOKUSAI ELECTRIC CORP10 citations85

NABETA KAZUYA

1 patent

US9305820B2Apr 5, 2016

Substrate processing apparatus and method of manufacturing semiconductor device

NABETA KAZUYA2 citations47