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Inventor
NG TAI-KAM
US
2 patents
Patents
2 patents
US10902579B1
Jan 26, 2021
Creating and tuning a classifier to capture more defects of interest during inspection
KLA TENCOR CORP
4 citations
69
US9489599B2
Nov 8, 2016
Decision tree construction for automatic classification of defects on semiconductor wafers
KLA TENCOR CORP
0 citations
36