Inventor
LEE KYEONG MI
KR3 patents
⚠️ This page may combine multiple inventors who share the name “LEE KYEONG MI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
2 patentsUS10352964B2Jul 16, 2019
Cantilever set for atomic force microscopes, substrate surface inspection apparatus including the same, method of analyzing surface of semiconductor substrate by using the same, and method of forming micropattern by using the same
SAMSUNG ELECTRONICS CO LTD1 citations59
US9892918B2Feb 13, 2018
Method of forming pattern of semiconductor device
SAMSUNG ELECTRONICS CO LTD0 citations38