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Inventor
LAWLOR COLLEEN
US
2 patents
Patents
2 patents
US10460930B2
Oct 29, 2019
Selective growth of SiO2 on dielectric surfaces in the presence of copper
LAM RES CORP
18 citations
90
US10825679B2
Nov 3, 2020
Selective growth of SIO2 on dielectric surfaces in the presence of copper
LAM RES CORP
2 citations
69