P

Inventor

PANAGOPOULOS THEO

US7 patents
⚠️ This page may combine multiple inventors who share the name “PANAGOPOULOS THEO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES CORP

4 patents
US9953843B2Apr 24, 2018

Chamber for patterning non-volatile metals

LAM RES CORP15 citations82
US10665435B2May 26, 2020

Chamber with vertical support stem for symmetric conductance and RF delivery

LAM RES CORP1 citations72
US10395902B2Aug 27, 2019

Chamber with vertical support stem for symmetric conductance and RF delivery

LAM RES CORP1 citations72
US10049862B2Aug 14, 2018

Chamber with vertical support stem for symmetric conductance and RF delivery

LAM RES CORP4 citations72

PANAGOPOULOS THEO

2 patents
US8133349B1Mar 13, 2012

Rapid and uniform gas switching for a plasma etch process

PANAGOPOULOS THEO214 citations95
US9011631B2Apr 21, 2015

Rapid and uniform gas switching for a plasma etch process

PANAGOPOULOS THEO1 citations48

MCCHESNEY JON

1 patent
US9679751B2Jun 13, 2017

Chamber filler kit for plasma etch chamber useful for fast gas switching

MCCHESNEY JON0 citations32