Inventor
GATTO MICHAEL J
US2 patents
Patents
2 patentsUS6013574AJan 11, 2000
Method of forming low resistance contact structures in vias arranged between two levels of interconnect lines
ADVANCED MICRO DEVICES INC54 citations94
US6046796AApr 4, 2000
Methodology for improved semiconductor process monitoring using optical emission spectroscopy
ADVANCED MICRO DEVICES INC56 citations89