Inventor

MENCK ALEXANDER

DE3 patents

⚠️ This page may combine multiple inventors who share the name “MENCK ALEXANDER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZEISS STIFTUNG

1 patent

US6885491B2Apr 26, 2005

Diffraction-optical component, illumination system and exposure system comprising such a diffraction-optical component as well as an exposure method employing such an exposure system

ZEISS STIFTUNG10 citations71

ZEISS CARL

1 patent

US6597763B2Jul 22, 2003

Spectrometer arrangement

ZEISS CARL4 citations59

ZEISS CARL SMT AG

1 patent

US6948821B2Sep 27, 2005

Mirror for reflecting electromagnetic radiation as well as illumination and imaging method employing the same

ZEISS CARL SMT AG3 citations56