Inventor
SHIH JENNIFER
US5 patents
Patents
5 patentsUS7417307B2Aug 26, 2008
System and method for direct-bonding of substrates
HEWLETT PACKARD DEVELOPMENT CO36 citations92
US7045958B2May 16, 2006
Vacuum device having a getter
HEWLETT PACKARD DEVELOPMENT CO17 citations92
US6988924B2Jan 24, 2006
Method of making a getter structure
HEWLETT PACKARD DEVELOPMENT CO9 citations73
US7741157B2Jun 22, 2010
System and method for direct bonding of substrates
HEWLETT PACKARD DEVELOPMENT CO0 citations51
US7608998B2Oct 27, 2009
Vacuum device having non-evaporable getter component with increased exposed surface area
HEWLETT PACKARD DEVELOPMENT CO1 citations51