Inventor
RUBINGH MARIA JOHANNA AGNES
NL5 patents
⚠️ This page may combine multiple inventors who share the name “RUBINGH MARIA JOHANNA AGNES”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
3 patentsUS7724351B2May 25, 2010
Lithographic apparatus, device manufacturing method and exchangeable optical element
ASML NETHERLANDS BV12 citations89
US7307690B1Dec 11, 2007
Device manufacturing method, computer program product and lithographic apparatus
ASML NETHERLANDS BV13 citations82
US7456931B2Nov 25, 2008
Device manufacturing method, computer program product and lithographic apparatus
ASML NETHERLANDS BV4 citations61