Inventor
NOGI KEITA
JP13 patents
⚠️ This page may combine multiple inventors who share the name “NOGI KEITA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NAKATA TERUO
4 patentsUS8538573B2Sep 17, 2013
Vacuum processing apparatus and program
NAKATA TERUO6 citations69
US8849446B2Sep 30, 2014
Vacuum processing apparatus and program
NAKATA TERUO1 citations48
US9385016B2Jul 5, 2016
Semiconductor processing system and program
NAKATA TERUO0 citations37
US8812151B2Aug 19, 2014
Vacuum process device and vacuum process method
NAKATA TERUO0 citations36
HITACHI HIGH TECH CORP
4 patentsUS11289313B2Mar 29, 2022
Plasma processing apparatus
HITACHI HIGH TECH CORP1 citations61
US8588962B2Nov 19, 2013
Vacuum processing device and method of transporting process subject member
HITACHI HIGH TECH CORP1 citations48
US9507328B2Nov 29, 2016
Processing chamber allocation setting device and processing chamber allocation setting program
HITACHI HIGH TECH CORP0 citations39
US9257318B2Feb 9, 2016
Operation method for vacuum processing apparatus
HITACHI HIGH TECH CORP0 citations37
HITACHI LTD
3 patentsUS11580481B2Feb 14, 2023
Production management support system and production management support method that automatically determine loss factors
HITACHI LTD3 citations71
US11514384B2Nov 29, 2022
Productivity improvement support system and productivity improvement support method
HITACHI LTD0 citations49
US11315064B2Apr 26, 2022
Information processing device and production instruction support method
HITACHI LTD0 citations49