Inventor

BOEHM THURE

DE4 patents

⚠️ This page may combine multiple inventors who share the name “BOEHM THURE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZEISS CARL SMT AG

1 patent

US6667839B2Dec 23, 2003

Holding device for an optical element made of a crystalline material

ZEISS CARL SMT AG18 citations78

ZEISS CARL SMT GMBH

1 patent

US9575224B2Feb 21, 2017

Mirror, projection objective with such mirror, and projection exposure apparatus for microlithography with such projection objective

ZEISS CARL SMT GMBH3 citations70

SCHOTT GLAS

1 patent

US6740159B2May 25, 2004

Method of making a fracture-resistant calcium fluoride single crystal and its use

SCHOTT GLAS8 citations70

BOEHM THURE

1 patent

US8795839B2Aug 5, 2014

Repair method for optical elements having a coating and corresponding optical elements

BOEHM THURE0 citations40