Inventor
MIZUNAGA SATOSHI
JP7 patents
Patents
7 patentsUS10460950B2Oct 29, 2019
Substrate processing system and substrate processing method
TOKYO ELECTRON LTD2 citations72
US12482663B2Nov 25, 2025
Processing apparatus
TOKYO ELECTRON LTD0 citations61
US9378944B2Jun 28, 2016
Method and apparatus of forming carbon film
TOKYO ELECTRON LTD1 citations47
US9279183B2Mar 8, 2016
Film forming apparatus and method of operating the same
TOKYO ELECTRON LTD1 citations47
US8993456B2Mar 31, 2015
Film forming apparatus and method of operating the same
TOKYO ELECTRON LTD0 citations47
US12344936B2Jul 1, 2025
Liquid raw material supplying method and gas supply apparatus
TOKYO ELECTRON LTD0 citations44
US7959737B2Jun 14, 2011
Film formation apparatus and method for using the same
TOKYO ELECTRON LTD0 citations40