Inventor
SHAMSI ZOHREH
US4 patents
Patents
4 patentsUS10196685B2Feb 5, 2019
Methods and systems for delivering process gases to critical process applications
RASIRC INC3 citations68
US9610550B2Apr 4, 2017
Method of delivering a process gas from a multi-component solution
RASIRC INC4 citations68
US11458412B2Oct 4, 2022
Controlled vapor delivery into low pressure processes
RASIRC INC0 citations48
US11154792B2Oct 26, 2021
Methods and systems for generating process gases
RASIRC INC0 citations44