Inventor
IMAMURA TSUBASA
JP15 patents
⚠️ This page may combine multiple inventors who share the name “IMAMURA TSUBASA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOSHIBA KK
6 patentsUS9384980B2Jul 5, 2016
Manufacturing method of semiconductor device
TOSHIBA KK3 citations72
US9111875B2Aug 18, 2015
Pattern formation method
TOSHIBA KK3 citations62
US9105584B2Aug 11, 2015
Method of manufacturing a semiconductor device
TOSHIBA KK2 citations62
US9502470B2Nov 22, 2016
Semiconductor memory device and method for manufacturing same
TOSHIBA KK0 citations51
US7902076B2Mar 8, 2011
Method of fabricating semiconductor device
TOSHIBA KK1 citations50
US9373523B2Jun 21, 2016
Semiconductor device manufacturing method
TOSHIBA KK0 citations40
TOSHIBA MEMORY CORP
5 patentsUS10490415B2Nov 26, 2019
Method of manufacturing 3-dimensional memories including high aspect ratio memory hole patterns
TOSHIBA MEMORY CORP5 citations72
US9871054B2Jan 16, 2018
Semiconductor device and method for manufacturing same
TOSHIBA MEMORY CORP3 citations72
US10381198B2Aug 13, 2019
Plasma processing apparatus and plasma processing method
TOSHIBA MEMORY CORP1 citations62
US10727278B2Jul 28, 2020
Method of manufacturing semiconductor device and semiconductor manufacturing apparatus
TOSHIBA MEMORY CORP0 citations50
US10026622B2Jul 17, 2018
Method for manufacturing semiconductor device
TOSHIBA MEMORY CORP0 citations41
KIOXIA CORP
3 patentsUS11024510B2Jun 1, 2021
Pattern forming method and method of manufacturing semiconductor device
KIOXIA CORP0 citations60
US12176236B2Dec 24, 2024
Semiconductor manufacturing apparatus and method for manufacturing semiconductor device
KIOXIA CORP0 citations52
US11651969B2May 16, 2023
Etching method, semiconductor manufacturing apparatus, and method of manufacturing semiconductor device
KIOXIA CORP0 citations51