Inventor
MASLOW MARK JOHN
NL12 patents
Patents
12 patentsUS11379970B2Jul 5, 2022
Deep learning for semantic segmentation of pattern
ASML NETHERLANDS BV8 citations85
US10571806B2Feb 25, 2020
Method and system to monitor a process apparatus
ASML NETHERLANDS BV5 citations83
US11768442B2Sep 26, 2023
Method of determining control parameters of a device manufacturing process
ASML NETHERLANDS BV1 citations71
US11513442B2Nov 29, 2022
Method of determining control parameters of a device manufacturing process
ASML NETHERLANDS BV2 citations71
US12332573B2Jun 17, 2025
Method for determining defectiveness of pattern based on after development image
ASML NETHERLANDS BV3 citations69
US11847570B2Dec 19, 2023
Deep learning for semantic segmentation of pattern
ASML NETHERLANDS BV1 citations62
US11733610B2Aug 22, 2023
Method and system to monitor a process apparatus
ASML NETHERLANDS BV0 citations62
US11520239B2Dec 6, 2022
Separation of contributions to metrology data
ASML NETHERLANDS BV1 citations62
US12586170B2Mar 24, 2026
System and method for generating predictive images for wafer inspection using machine learning
ASML NETHERLANDS BV1 citations61
US12197136B2Jan 14, 2025
Method of determining control parameters of a device manufacturing process
ASML NETHERLANDS BV0 citations61
US11860548B2Jan 2, 2024
Method for characterizing a manufacturing process of semiconductor devices
ASML NETHERLANDS BV1 citations59
US10866523B2Dec 15, 2020
Process window tracker
ASML NETHERLANDS BV0 citations41