Inventor
ANUNCIADO ROY
NL6 patents
Patents
6 patentsUS11768442B2Sep 26, 2023
Method of determining control parameters of a device manufacturing process
ASML NETHERLANDS BV1 citations71
US11513442B2Nov 29, 2022
Method of determining control parameters of a device manufacturing process
ASML NETHERLANDS BV2 citations71
US11143971B2Oct 12, 2021
Control based on probability density function of parameter
ASML NETHERLANDS BV3 citations70
US11579535B2Feb 14, 2023
Method of determining the contribution of a processing apparatus to a substrate parameter
ASML NETHERLANDS BV3 citations68
US11520239B2Dec 6, 2022
Separation of contributions to metrology data
ASML NETHERLANDS BV1 citations62
US12197136B2Jan 14, 2025
Method of determining control parameters of a device manufacturing process
ASML NETHERLANDS BV0 citations61