Inventor

CRAMER HUGO AUGUSTINUS JOSEPH

NL70 patents

⚠️ This page may combine multiple inventors who share the name “CRAMER HUGO AUGUSTINUS JOSEPH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CRAMER HUGO AUGUSTINUS JOSEPH

ASML NETHERLANDS BV

Device inspection method and apparatus using an asymmetric marker

Lithographic apparatus, device manufacturing method, and device manufactured thereby

Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method

Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method

Method and apparatus to determine a patterning process parameter, associated with a change in a physical configuration, using measured pixel optical characteristic values

Method and apparatus to determine a patterning process parameter

Method and apparatus to determine a patterning process parameter using an asymmetric optical characteristic distribution portion

Methods and scatterometers, lithographic systems, and lithographic processing cells

Method and apparatus to determine a patterning process parameter using a unit cell having geometric symmetry

Method and apparatus to determine a patterning process parameter

Method and apparatus to determine a patterning process parameter

Method and apparatus to determine a patterning process parameter

Inspection apparatus, lithographic apparatus, lithographic processing cell and inspection method

Method and apparatus to determine a patterning process parameter

Beat patterns for alignment on small metrology targets

Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method for determining a parameter of a target pattern

Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method

Method for process metrology

Metrology method and apparatus, computer program and lithographic system

Method and apparatus for measuring a parameter of a lithographic process, substrate and patterning devices for use in the method

Method of determining critical-dimension-related properties, inspection apparatus and device manufacturing method

Method of determining dose, inspection apparatus, patterning device, substrate and device manufacturing method

Metrology apparatus

Method for process metrology

Metrology apparatus

Metrology apparatus and method for determining a characteristic of one or more structures on a substrate

Inspection method and apparatus, lithographic system and device manufacturing method

Method and apparatus for measuring a parameter of interest using image plane detection techniques

Statistical hierarchical reconstruction from metrology data

Lithographic focus and dose measurement using a 2-D target

Method for monitoring a characteristic of illumination from a metrology apparatus

Method of determining dose and focus, inspection apparatus, patterning device, substrate and device manufacturing method

Method of measuring a target, metrology apparatus, lithographic cell, and target

Metrology apparatus

Dark field digital holographic microscope and associated metrology method

Method and apparatus to determine a patterning process parameter

Method and apparatus to determine a patterning process parameter

Metrology apparatus and method for determining a characteristic of one or more structures on a substrate

Separation of contributions to metrology data

Method and apparatus to determine a patterning process parameter

Method and apparatus for measuring a parameter of a lithographic process, substrate and patterning devices for use in the method

DEN BOEF ARIE JEFFREY

Method of optimizing a model, a method of measuring a property, a device manufacturing method, a spectrometer and a lithographic apparatus

Method of assessing a model of a substrate, an inspection apparatus and a lithographic apparatus

Inspection method for lithography

Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method

CRAMER HUGO AUGUSTINUS JOSEPH

Methods and scatterometers, lithographic systems, and lithographic processing cells

Inspection apparatus, lithographic apparatus, lithographic processing cell and inspection method

Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method

LEEWIS CHRISTIAN MARINUS

Lithographic focus and dose measurement using a 2-D target

ABEN MARIA JOHANNA HENDRIKA

Method and apparatus for measuring a structure on a substrate, computer program products for implementing such methods and apparatus